Beilstein J. Nanotechnol.2017,8, 1972–1981, doi:10.3762/bjnano.8.198
: grafted brush layer, chemical pattern creation and brush/block co-polymer interface.
Keywords: block copolymer; chemicalguidingpattern; directed self-assembly; thin film; X-ray photoemission spectroscopy; Introduction
Directed self-assembly (DSA) of block copolymers (BCPs) is a chemical-based
chemicalguidingpattern, it is important to determine which chemical interactions occur between both modified and unmodified regions of the substrate with each block of the copolymer. One technique especially suited for the characterization of buried interfaces is hard X-ray high kinetic energy
contributes to the alignment of the BCP, as shown in Figure 6b.
Now, we focus the analysis on the sample prepared by PON. Figure 7a shows an AFM image of a chemicalguidingpattern created by PON. The effect of the brush modification is an effective replication of the DVD pattern with modified regions
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Figure 1:
Schematized description of the selected chemical epitaxy DSA processes performed on grafted brush l...